半導体パラメータアナライザ
 概要:The Agilent 4156A / HP 4156A is a percision semiconductor parameter analyzer. Digital sweep parameter and a reliable tester, powereful failure analysis tool, and automated incoming inspection tool all in one package. All measurements are displayed on the color CRT screen and the ability to superimpose stored graphics from the graphics memory for comparison is available. Unit includes HPIB or serial output ports. 特徴:4 built in SMUs (2 VMUs, and 2 VSU's). The 4156A extends the current resolution to 1 fA and the accuracy of to 20 fA. It also ultilizes full kelvin remote sensing on each SMU. link | 
